1. 67 7754621
Process for producing zirconium oxide thin films
Inventors: Matti Putkonen 2. 65 10047435
Dual selective deposition
Inventors: Suvi Haukka; Raija H. Matero; Eva Tois; Antti Niskanen; Marko Tuominen; Hannu Huotari; Viljami Pore 2. 65 7611751
Vapor deposition of metal carbide films
Inventors: Kai-Erik Elers 2. 65 8956971
Selective formation of metallic films on metallic surfaces
Inventors: Suvi Haukka; Antti Niskanen; Marko Tuominen 2. 65 9455138
Method for forming dielectric film in trenches by PEALD using H-containing gas
Inventors: Atsuki Fukazawa; Hideaki Fukuda; Noboru Takamure; Masaru Zaitsu 6. 64 6143082
Isolation of incompatible processes in a multi-station processing chamber
Inventors: Edward J. McInerney; Thomas M. Pratt; Shawn Hancock 6. 64 8173554
Method of depositing dielectric film having Si-N bonds by modified peald method
Inventors: Woo Jin Lee; Kuo-wei Hong; Akira Shimizu; Deakyun Jeong 8. 63 10014212
Selective deposition of metallic films
Inventors: Shang Chen; Toshiharu Watarai; Takahiro Onuma; Dai Ishikawa; Kunitoshi Namba 8. 63 10186420
Formation of silicon-containing thin films
Inventors: Atsuki Fukazawa 8. 63 7084060
Forming capping layer over metal wire structure using selective atomic layer deposition
Inventors: Toshiharu Furukawa; Steven J. Holmes; David V. Horak; Charles W. Koburger, III 8. 63 8119527
Depositing tungsten into high aspect ratio features
Inventors: Anand Chadrashekar; Raashina Humayun; Michal Danek; Aaron R. Fellis; Sean Chang 8. 63 9129897
Metal silicide, metal germanide, methods for making the same
Inventors: Viljami Pore; Suvi Haukka; Tom E. Blomberg; Eva Tois 8. 63 9911595
Selective growth of silicon nitride
Inventors: David Charles Smith; Dennis M. Hausmann |