1. 109 9748923
Elastic wave device and manufacturing method for same
Inventors: Hajime Kando; Syunsuke KIDO; Keiji Okada; Munehisa WATANABE 2. 108 9525398
Single crystal micromechanical resonator and fabrication methods thereof
Inventors: Roy H. Olsson; Thomas A. Friedmann; Sara Jensen Homeijer; Michael Wiwi; Khalid Mikhiel Hattar; Blythe Clark; Todd Bauer; Stuart B. Van Deusen 3. 107 10200013
Micro-transfer-printed acoustic wave filter device
Inventors: Christopher Bower; Matthew Meitl; Ronald S. Cok 3. 107 9369105
Method for manufacturing a vibrating MEMS circuit
Inventors: Sheng-Shian Li; Seungbae Lee; Kushal Bhattacharjee 5. 106 6540827
Slicing of single-crystal films using ion implantation
Inventors: Miguel Levy; Richard M. Osgood, Jr.; Antonije M. Radojevic 5. 106 7463118
Piezoelectric resonator with an efficient all-dielectric Bragg reflector
Inventors: Stuart M. Jacobsen 5. 106 7535152
Lamb wave device
Inventors: Takashi Ogami; Kansho Yamamoto; Michio Kadota 5. 106 7684109
Bragg mirror optimized for shear waves
Inventors: Ed Godshalk; Guillaume Bouche 5. 106 7868519
Piezoelectric resonator including an acoustic reflector portion
Inventors: Keiichi Umeda 5. 106 8278802
Planarized sacrificial layer for MEMS fabrication
Inventors: Seungbae Lee; Sheng-Shian Li; Kushal Bhattacharjee 5. 106 8829766
Piezoelectric resonator operating in thickness shear mode
Inventors: Evgeny Milyutin; Paul Muralt 5. 106 9276557
Programmable electroacoustic filter apparatus and method for its manufacture
Inventors: Christopher Nordquist; Roy H. Olsson; Sean M. Scott; Kenneth Wojciechowski; Darren W. Branch 5. 106 9425765
Nano- and micro-electromechanical resonators
Inventors: Matteo Rinaldi; Zhenyun Qian; Yu Hui |