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Micro-transfer-printed acoustic wave filter device
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Christopher Bower; Matthew Meitl; Ronald S. Cok
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Transversely-excited film bulk acoustic resonator
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Viktor Plesski; Soumya Yandrapalli; Robert B. Hammond; Bryant Garcia; Patrick Turner; Jesson John; Ventsislav Yantchev
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Planarized sacrificial layer for MEMS fabrication
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Seungbae Lee; Sheng-Shian Li; Kushal Bhattacharjee
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Nano- and micro-electromechanical resonators
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Matteo Rinaldi; Zhenyun Qian; Yu Hui
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Single crystal micromechanical resonator and fabrication methods thereof
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Roy H. Olsson; Thomas A. Friedmann; Sara Jensen Homeijer; Michael Wiwi; Khalid Mikhiel Hattar; Blythe Clark; Todd Bauer; Stuart B. Van Deusen
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Slicing of single-crystal films using ion implantation
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Miguel Levy; Richard M. Osgood, Jr.; Antonije M. Radojevic
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Piezoelectric resonator with an efficient all-dielectric Bragg reflector
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Stuart M. Jacobsen
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Lamb wave device
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Takashi Ogami; Kansho Yamamoto; Michio Kadota
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Bragg mirror optimized for shear waves
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Piezoelectric resonator including an acoustic reflector portion
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Keiichi Umeda
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Piezoelectric resonator operating in thickness shear mode
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Evgeny Milyutin; Paul Muralt
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Laterally coupled bulk acoustic wave filter with improved passband characteristics
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Johanna Meltaus; Tuomas Pensala
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Programmable electroacoustic filter apparatus and method for its manufacture
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Christopher Nordquist; Roy H. Olsson; Sean Michael Scott; Kenneth Wojciechowski; Darren W. Branch
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Method for manufacturing a vibrating MEMS circuit
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Sheng-Shian Li; Seungbae Lee; Kushal Bhattacharjee
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Elastic wave device and method for manufacturing the same
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Tetsuya Kimura; Takashi Ogami; Katsuya Daimon
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