Micro-Structural and Nano-Technology

Citations to U.S. patents by U.S. patents granted in 2020

Top 10   [Cited by Examiner | Cited by Applicant]

Related WIPO fields:[Semiconductors | Measurement | Electrical machinery, apparatus, energy | Materials, metallurgy | Optics | Chemical engineering | Surface technology, coating All WIPO fields

[Cited by Examiner | Cited by Applicant]
Most Cited by Examiners

  1. 9 9653289    Fabrication of nano-sheet transistors with different threshold voltages
  Inventors: Karthik Balakrishnan; Kangguo Cheng; Pouya Hashemi; Alexander Reznicek

  2. 7 8778768    Non-replacement gate nanomesh field effect transistor with epitixially grown source and drain
  Inventors: Josephine B. Chang; Paul Chang; Issac Lauer; Jeffrey W. Sleight

  3. 5 9837414    Stacked complementary FETs featuring vertically stacked horizontal nanowires
  Inventors: Karthik Balakrishnan; Kangguo Cheng; Pouya Hashemi; Alexander Reznicek

  4. 4 10103065    Gate metal patterning for tight pitch applications
  Inventors: Shogo Mochizuki; Alexander Reznicek; Joshua M. Rubin; Junli Wang

  4. 4 10103238    Nanosheet field-effect transistor with full dielectric isolation
  Inventors: Hui Zang; Tek Po Rinus Lee; Haigou Huang; Ruilong Xie; Min Gyu Sung; Chanro Park

  4. 4 8030722    Reversible top/bottom MEMS package
  Inventors: David Bolognia; Bob Shih-Wei Kuo; Bud Troche

  4. 4 9570609    Crystalline multiple-nanosheet strained channel FETs and methods of fabricating the same
  Inventors: Borna J. Obradovic; Robert C. Bowen; Mark S. Rodder

  4. 4 9773875    Fabrication of silicon-germanium fin structure having silicon-rich outer surface
  Inventors: Hemanth Jagannathan; Choonghyun Lee; Shogo Mochizuki; Koji Watanabe

  4. 4 9954058    Self-aligned air gap spacer for nanosheet CMOS devices
  Inventors: Shogo Mochizuki; Alexander Reznicek; Joshua M. Rubin; Junli Wang

  10. 3 10002939    Nanosheet transistors having thin and thick gate dielectric material
  Inventors: Kangguo Cheng; Ruilong Xie; Tenko Yamashita; Chun-Chen Yeh

  10. 3 10008583    Gate-all-around nanosheet field-effect transistors and methods of manufacturing the same
  Inventors: Mark S. Rodder; Joon Goo Hong

  10. 3 10014390    Inner spacer formation for nanosheet field-effect transistors with tall suspensions
  Inventors: Guillaume Bouche; Julien Frougier; Ruilong Xie

  10. 3 5511428    Backside contact of sensor microstructures
  Inventors: Howard D. Goldberg; Martin Schmidt

  10. 3 6535460    Miniature broadband acoustic transducer
  Inventors: Peter V. Loeppert; Michael E. Pederson

  10. 3 6857501    Method of forming parylene-diaphragm piezoelectric acoustic transducers
  Inventors: Cheol Han; Eun Sok Kim

  10. 3 7007471    Unilateral thermal buckle beam actuator
  Inventors: Michael J. Sinclair

  10. 3 7830695    Capacitive arrangement for qubit operations
  Inventors: Jeong-Sun Moon

  10. 3 9067779    Microfabricated ultrasonic transducers and related apparatus and methods
  Inventors: Jonathan M. Rothberg; Susan A. Alie; Keith G. Fife; Nevada J. Sanchez; Tyler S. Ralston

  10. 3 9276064    Fabricating stacked nanowire, field-effect transistors
  Inventors: Hui Zang; Guillaume Bouche; Gabriel Padron Wells

  10. 3 9362355    Nanosheet MOSFET with full-height air-gap spacer
  Inventors: Kangguo Cheng; Bruce B. Doris; Michael A. Guillorn; Xin Miao

  10. 3 9516421    Acoustic sensing apparatus and method of manufacturing the same
  Inventors: Peter V. Loeppert; Michael Syskind PEDERSEN

  10. 3 9570551    Replacement III-V or germanium nanowires by unilateral confined epitaxial growth
  Inventors: Karthik Balakrishnan; Kangguo Cheng; Pouya Hashemi; Alexander Reznicek

  10. 3 9660028    Stacked transistors with different channel widths
  Inventors: Kangguo Cheng; Lawrence A. Clevenger; Balasubramanian Pranatharthiharan; John H. Zhang

  10. 3 9660033    Multi-gate device and method of fabrication thereof
  Inventors: I-Sheng Chen; Chih Chieh Yeh; Cheng-Hsien Wu; Yee-Chia Yeo

  10. 3 9842914    Nanosheet FET with wrap-around inner spacer
  Inventors: Chun Wing Yeung; Chen Zhang

  10. 3 9847390    Self-aligned wrap-around contacts for nanosheet devices
  Inventors: Ruilong Xie; Chanro Park; Min Gyu Sung; Hoon Kim

  10. 3 9972720    Semiconductor device having a planar insulating layer
  Inventors: Dong Il Bae

  10. 3 9997519    Dual channel structures with multiple threshold voltages
  Inventors: Ruqiang Bao; Michael A. Guillorn; Vijay Narayanan

[Cited by Examiner | Cited by Applicant]
Most Cited by Applicants

  1. 30 9236267    Cut-mask patterning process for fin-like field effect transistor (FinFET) device
  Inventors: Ho Wei De; Kuei-Liang Lu; Ming-Feng Shieh; Ching-Yu Chang

  1. 30 9520482    Method of cutting metal gate
  Inventors: Po-Chin Chang; Chih-Hao Wang; Kai-Chieh Yang; Shih-Ting Hung; Wei-Hao Wu; Gloria Wu; Inez Fu; Chia-Wei Su; Yi-Hsuan Hsiao

  1. 30 9576814    Method of spacer patterning to form a target integrated circuit pattern
  Inventors: Chieh-Han Wu; Cheng-Hsiung Tsai; Chung-Ju Lee; Ming-Feng Shieh; Ru-Gun Liu; Shau-Lin Shue; Tien-I Bao

  4. 25 9608116    FINFETs with wrap-around silicide and method forming the same
  Inventors: Kuo-Cheng Ching; Ching-Wei Tsai; Chi-Wen Liu; Chih-Hao Wang; Ying-Keung Leung

  5. 24 9502265    Vertical gate all around (VGAA) transistors and methods of forming the same
  Inventors: Ching-Hong Jiang; Li-Ting Wang; Teng-Chun Tsai; Shih-Chiang Chen

  5. 24 9536738    Vertical gate all around (VGAA) devices and methods of manufacturing the same
  Inventors: Yu-Lien Huang; Chun-Hsiung Lin; Chi-Wen Liu

  7. 19 9209247    Self-aligned wrapped-around structure
  Inventors: Jean-Pierre Colinge; Kuo-Cheng Ching; Ta-Pen Guo; Carlos H. Diaz

  7. 19 9412828    Aligned gate-all-around structure
  Inventors: Kuo-Cheng Ching; Jean-Pierre Colinge; Zhiqiang Wu

  9. 18 9412817    Silicide regions in vertical gate all around (VGAA) devices and methods of forming same
  Inventors: Kai-Chieh Yang; Wai-Yi Lien

  9. 18 9472618    Nanowire field effect transistor device having a replacement gate
  Inventors: Richard Kenneth Oxland

 
 
References:
Raw data from: U.S. Patent and Trademark Office. "Data Download Tables." PatentsView. Accessed October 30, 2025. https://patentsview.org/download/data-download-tables.

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Published: February 18, 2026